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Fabrication and Characterization of SOI-CMOS Using Minimal-Fab and Mega-Fab Hybrid Process
Fabrication and Characterization of SOI-CMOS Using Minimal-Fab and Mega-Fab Hybrid Process
2018
Liu Yongxun
Tanaka Hiroyuki
Koga Kazuhiro
Sato Kazushige
Khumpuang Sommawan
Nagao Masayoshi
Matsukawa Takashi
Hara Shiro
Keywords:
Optoelectronics
Silicon on insulator
Mega-
Fabrication
CMOS
Microelectromechanical systems
Materials science
soi cmos
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