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Epitaxial growth of γ-(Al x Ga 1-x ) 2 O 3 alloy thin films by mist chemical vapor deposition
Epitaxial growth of γ-(Al x Ga 1-x ) 2 O 3 alloy thin films by mist chemical vapor deposition
2020
Ryuto Horie
Daisuke Tahara
Hiroyuki Nishinaka
Masahiro Yoshimoto
Keywords:
Thin film
Materials science
Mist
Chemical vapor deposition
Chemical engineering
Epitaxy
Alloy
Wide-bandgap semiconductor
Gallium oxide
Correction
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