Pull-in Phenomena of Multilevel Meander Magnetic Microactuator

Based on the magnetic pull-in equations, pull-in phenomena of the ideal mode were analyzed using the magneto-motive-force (MMF)-controlled model and the flux-controlled model. Calculation and simulation results suggest that there is critical pull-in angle in multilevel meander magnetic microactuator: under the condition of the MMF-controlled model, the critical pull-in angle is about 44% of the maxium rotating angle of the system; while under the condition of the flux-controlled model, the ratio of the critical pull-in angle to the maxium rotating angle is 72.35%. The error of the critical pull-in angle between MMF-controlled experimental result and the theoretical one is only about 8%.