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Growth of 3C-SiC films on Si(001) and formation of stacking faults studied by X-TEM
Growth of 3C-SiC films on Si(001) and formation of stacking faults studied by X-TEM
2016
Jun Yamasaki
Atsushi Ishida
Kensuke Akiyama
Yasuo Hirabayashi
Keywords:
Stacking
Crystallography
Electron microscope
Materials science
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