Effect of Carbon Ion Implantation on a Bi-Layer Transparent Electrode

Present investigation reports the development and performance of transparent conducting electrode (TCE) having oxide-metal bilayer structure; ZnO/Ag deposited at 300 K and showing good electrical and optical properties. Low energetic ion implanted films show a variation of electrical properties; sheet resistance, carrier concentration and mobility under ion fluence variation implying tunability. A thin film of silver (8 nm) was deposited on a corning glass substrate using sputtering with a subsequent deposition of 60 nm ZnO layer. Carbon ion beam of energy 40 keV with different fluences was used to modify properties of the bilayer structure.