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Improvement of buried oxide quality in low-dose SIMOX wafers by high-temperature oxidation
Improvement of buried oxide quality in low-dose SIMOX wafers by high-temperature oxidation
1995
Kazuhiko Kawamura
Teruyuki Nakajima
Isao Hamaguchi
Toshiaki Yano
Y. Nagatake
Mitsuyoshi Tachimori
Keywords:
Ion beam
Control engineering
Oxide
Mathematics
Electric field
Analytical chemistry
Wafer
Correction
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