Resonance surface, microwave power absorption, and plasma density distribution in an electron cyclotron resonance ion source

2019 
Resonance surfaces for a 2.45 GHz electron cyclotron resonance ion source are investigated. In addition to the typical flat-B and minimum-B profiles, we have investigated on two new magnetic field structures, namely the torus zone and the double zone configurations. The impacts of such surfaces on the microwave power absorption are discussed. Furthermore, the uniformity of the ion emissive surfaces in connection with the resonance surfaces is examined. Different configurations for absorbing microwave power and simultaneously for producing uniform ion density distribution near the extraction wall of the source are discussed.
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