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Molecular Layer Deposition of Alucone Thin Film on LiCoO2 to Enable High Voltage Operation
Molecular Layer Deposition of Alucone Thin Film on LiCoO2 to Enable High Voltage Operation
2021
Ortal Lidor-Shalev
Nicole Leifer
Michal Ejgenberg
Hagit Aviv
Ilana Perelshtein
Gil Goobes
Malachi Noked
Rosy
Keywords:
Atomic layer deposition
layer
Deposition (chemistry)
Materials science
High voltage
Optoelectronics
Thin film
Correction
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