Dielectric charging effects in floating electrode MEMS capacitive switches

Abstract The paper presents a study oriented to the understanding of the floating electrode role on the charging characteristics of floating electrode RF MEMS capacitive switches. Identical devices with and without floating electrode have been stressed under induced charging mode. Biases of different levels and polarities were applied to the transmission line. Reduced and asymmetric, with respect to the bias polarity, charging effects were obtained on devices with floating electrode compared to the conventional ones. The results contribute towards the conclusion that the use of floating electrode in conjunction with the appropriate actuation polarity may reduce the charging effects and thus improving the device lifetime.