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P(VDF/TrFE)薄膜を用いたMEMS超音波センサの感度改善;P(VDF/TrFE)薄膜を用いたMEMS超音波センサの感度改善;Improvement of Sensitivity of MEMS Ultrasonic Sensor Using P(VDF/TrFE) Thin Films
2016
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