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Quantitative dopant profiling in semiconductors: A new approach to Kelvin probe force microscopy
Quantitative dopant profiling in semiconductors: A new approach to Kelvin probe force microscopy
2012
Christine Baumgart
Keywords:
Dopant
Kelvin probe force microscope
Scanning capacitance microscopy
Microscopy
Semiconductor
Analytical chemistry
Materials science
Profiling (computer programming)
Nanotechnology
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