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Study on Validity and Reliablity of the Cutoff Probe and Langmuir Probe via Comparative Experiment in the Processing Plasma
Study on Validity and Reliablity of the Cutoff Probe and Langmuir Probe via Comparative Experiment in the Processing Plasma
2013
D.W. Kim
S. J. You
K H You
J.W. Lee
J H Kim
H. Y. Chang
W.Y. Oh
Keywords:
Cutoff
Plasma
Langmuir probe
Analytical chemistry
Chemistry
Atomic physics
Materials science
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