of Physics of Coal Science

The high Abstract The high quality In^Oa/Sn (ITO), I m) 9 and made Hall coefficient measurement, film thickness measurement, energy spectrum analysis, X-ray diffraction, Electrolytic electroreflectance spectra measu­ rement, etc. The result of which are discussed based on preliminary analysis and comparison. The square resistance of the film is in the proximity of few .a to few -ten-A. Its optical transmission in the visible range as_ high as 90^ and risistivity of 10"^ 2*1 O^Ji-cm, free carriers concentration of 10* 10*1 cm , free cariers mobility of 10-90cm/V.Sec are typically observed. Optical properties The transmission measurement of three kinds of doped In^Oj films which were deposited on melting quatz, thermal pressed ZnS and Mg% substrates was made with HITACHI 340-1000 spectr- ophotometer (I900l-2.6xan) and Fourien spectrometer (2.5-25>um). the transmission curves of In^Oj/In film deposited on quatz glass substrates with different thickness are ahown in Fig .(1) (wave length ranges from 3000A 2.6>itm), Transmission curves of three different kinds of doped films on the quatz glass are shown in Fig.2. The transmission curves of three goped films on thermal pressed ZnS substrates are shown in Fig. 3.(wavelength range from 3000A to 2.6/nm). In Fig. 4. are the transmission curves which wavelength range from 600 6400 cm"1, that is about 2.5 254m.