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Dynamics of three-dimensional DC magnetron discharge plasma
Dynamics of three-dimensional DC magnetron discharge plasma
1997
Kenichi Nanbu
Shuji Kondo
nanbu ken'iti
kondou syuuzi
Keywords:
Plasma
Computational chemistry
Particle-in-cell
Magnetic field
Equations of motion
Electric field
Monte Carlo method
Boundary value problem
Liquid-crystal display
Physics
Computational physics
Cavity magnetron
Classical mechanics
Correction
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