Fabrication of system with probe for high-frequency measurement applications

In this study, a new type of low temperature co-fired ceramic (LTCC) probes fabricated using the system-in-package (SiP) technology is proposed; these probes are used for high-frequency measurements. The advantage of LTCC probes is that suitable structures of the metal tips of their electrodes can be easily created by cutting LTCC sheets during the fabrication process. © 2010 Wiley Periodicals, Inc. Microwave Opt Technol Lett 52: 2083–2087, 2010; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.25416