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Surfaces Lattice Distortions in Silicon Implanted with Low-Energy Nitrogen Ions after Annealing
Surfaces Lattice Distortions in Silicon Implanted with Low-Energy Nitrogen Ions after Annealing
2006
Hideki Nagatomo
Taichiro Fukumori
Masako Kuroki
Yoshito Akashi
Koji Futagami
Keywords:
Nitrogen
Annealing (metallurgy)
Lattice (order)
Ion
Materials science
Silicon
Molecular physics
lattice distortion
low energy
Correction
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