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PREPARATION OF A NITRIDE FILM ON A SILICON SINGLE CRYSTAL
PREPARATION OF A NITRIDE FILM ON A SILICON SINGLE CRYSTAL
1991
N. M. Kutsiya
R.R. Shvangiradze
Keywords:
Crystallography
Single crystal
Inorganic chemistry
LOCOS
Nitride
Nanocrystalline silicon
Chemistry
Silicon
Nanotechnology
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