Systems and methods for increasing the operational reliability of MEMS devices

A device of a micro-electro-mechanical system (MEMS) containing in one embodiment at least two MEMS switches (110, 112, 155, 160, 206, 208) which are coupled together in a back-to-back configuration. The first and the second suspended element belonging to the first and second MEMS switches (110, 112, 155, 160, 206, 208) are electrically coupled. Further, a first and a second contact associated with the first and second MEMS switches (110, 112, 155, 160, 206, 208) configured such that a differential voltage between the second suspended element (161, 212) and the second contact (164, 216) is approximately equal to a difference voltage between the first suspended element (156, 210) and the first contact. The MEMS device (102, 202) includes at least one actuator, which is coupled to one or more of the first and the second suspended element to one or to actuate a plurality of the first and the second suspended element. In one example, the MEMS device (102, 202) includes one or more passive elements (114, 116, 224, 226) with one or more of the first and (second MEMS switches 110, 112, 155, 160 , 206, 208) are coupled.