Alteration of titanium dioxide material properties by glancing angle deposition plus annealing treatment

Abstract Titanium dioxide (TiO 2 ) nanostructured thin film (TNF), as an important semiconductor exhibiting large surface-to-volume ratio and unique property, has attracted more and more researches. As an important versatile nanofabrication technique, the glancing angle deposition technique (GLAD) is used to fabricate the TNF, frequently. However, little is known about the influence of GLAD on microstructure, crystalline structure, Ti/O chemical state and photoluminescence (PL) properties of TiO 2 thin films. In this paper, pure anatase TNF and traditional TiO 2 thin film (TTF) were deposited by combining GLAD system with the annealing treatment. All of the prepared TNFs keep discrete nanoscale columnar structures characterized by SEM. The evolution of morphology, crystallization structure, Ti/O chemical state and PL properties of TNFs and TTFs under annealing treatment have been investigated in detail. Simultaneously, comparing with TTFs, the influence of GLAD on TNFs material properties has been analyzed further. With the optimum annealing temperature (400 °C), one can obtain fine nanostructures and pure anatase precipitation of TNFs. The GLAD technique can adjust the preferred crystal orientation of TiO 2 thin films, which can be used as a method of material structural design. Both TNFs and TTFs exhibit broad band (380–700 nm) photoluminescence. Nevertheless, the TNFs exhibit much weaker and smoother PL spectra than that of TTFs, due to the large surface-to-volume ratio. The results indicate the potential good catalytic applications of TNFs deposited by GLAD.