Modeling and Analysis of a Navigational, Lorentz-Force, Z-axis MEMS Magnetometer in a Standard Process

This paper introduces a Z-axis Lorentz-force. capacitive, microelectromechanical (MEMS) magnetometer design using the MEMSCAP SOI process. The magnetometer model is analyzed using Matlab and a MEMS+ interfacing code to detect the displacement motion and the capacitance difference in the device under different damping conditions. The magnetometer is shown to have a mode frequency of 668 MHz but low mechanical and electrical sensitivities as the small mechanical displacements and capacitance change indicate. The device has high resolution and is able to measure nano-scaled motion but at high quality factor values. Several parameters sweep such as beam’s width and length have been performed and optimal values have been determined to maximize the mechanical sensitivity of the device.