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Characterization of MOCVD-TiO2 and ZrO2 insulating layers in MFIS structures by DLTS and ICTS methods
Characterization of MOCVD-TiO2 and ZrO2 insulating layers in MFIS structures by DLTS and ICTS methods
2003
Hironori Fujisawa
M. Sugata
Masaru Shimizu
H. Niu
Keywords:
Physics
Chemical physics
ICTS
Metalorganic vapour phase epitaxy
Nuclear magnetic resonance
Condensed matter physics
Engineering physics
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