Fabrication, Characterization and Modelling of Delay Line Based CMUTs

This paper presents fabrication, characterization and modelling of delay-line based capacitive micromachined ultrasonic transducers (CMUT). CMUTs have been fabricated using standard semiconductor processes, the electrical frequency response has been modelled by an equivalent circuit diagram and excellent agreement between theory and measurement is observed. Finally, the electrical crosstalk between two adjacent elements has been measured and showed more than −30 dB suppression for all frequencies between 1 MHz and 15 MHz in good agreement with the model developed.