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Fast analytical model of MZI micro-opto-mechanical pressure sensor
Fast analytical model of MZI micro-opto-mechanical pressure sensor
2018
Véronique Rochus
Roelof Jansen
J. Goyvaerts
Pieter Neutens
J. O’Callaghan
Xavier Rottenberg
Keywords:
Electronic engineering
Materials science
Pressure sensor
Mechanical engineering
mechanical pressure
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