Switch and rf ferroelectric MEMS: a new concept

We report a theoretical analysis of a new concept of switch and rf MEMS with a ferroelectric layer inserted in between the moving electrodes, namely the FeMEMS. Based on general considerations lying on hysteresis, we predict new operating modes when the system is used whether as a switch or as a variable capacitance. In particular, in switch mode operation, we find that both open and contact configurations can be stable states at zero applied voltage. Conversely, when the device is used as a variable capacitor (rf applications), we predict that it is still possible to setup a predefined capacitance with no voltage applied on the electrodes. From these results, we expect that FeMEMS should be a promising candidate for innovative applications of MEMS in electrical and optical fields.