Large Bolometer Arrays with Superconducting NbSi Sensors for Future Space Experiments

New techniques in microelectronics allow to build large arrays of bolometers filling the focal plane of submillimeter and millimeter telescopes. The expected sensitivity increase is the key for the next generation of space experiments in this wavelength range. Superconducting bolometers offer currently the best prospects in terms of sensitivity and multiplexed readout. We present here the developments led in France based on NbSi alloy thermometers. The manufacturing process of a 23 pixel array and the test setup are described.