Characteristics of the 2nd Harmonic ECR Micro Plasma Sources by Using PIC/MCC Simulations

In this paper we have presented our simulation studies of 2.4 GHz microwave plasma production under the electron cyclotron resonance with an idea to expand the plasma generation conditions into the much lower pressure range and much shorter gap length. As the rst for this purpose, we have focused on the in uences of applied magnetic eld, gas pressure and gap length on the breakdown and maintenance of plasmas. Calculations were performed by using a one-dimensional particle-in-cell/Monte Carlo collisions code with three velocity components. The obtained simulation results are in a good agreement with the available experimental data providing an insight into the resonant electron acceleration for ECR condition and the resonant electron con nement for the 2nd harmonic ECR. In addition, analytical expressions for the breakdown voltage and the trapping eld have been derived.