Environmental testing of high-actuator-count MEMS deformable mirrors for space-based applications

Coronagraph instruments on future space telescopes will rely on deformable mirrors to create high contrast images for the direct detection of exoplanets. As part of the NASA Exoplanet Explorations Program’s coronagraph technology development efforts, two sets of Micro-Electro-Mechanical Systems (MEMS) deformable mirrors manufactured by Boston Micromachines Corporation were exposed to vibration and thermal cycles representative of launch conditions. The first set of mirrors were 952-actuator Kilo-DMs that successfully demonstrated 100% actuator survival and achieved ~1e- 8 contrast after the environmental test. The second round used an engineering-grade 2048-actuator deformable mirror on which few changes were identified after the environmental test. However, each actuator that changed behavior was flagged as anomalous beforehand or was directly adjacent to a defective actuator. From this result, we hypothesized that typical actuators on a science grade deformable mirror are robust to environmental testing. A third set of 2048-actuator deformable mirrors have been procured for a planned test to characterize the deformable mirrors using interferometric measurements, contrast results on a new in-air coronagraph testbed, and infrared microscopy on the internal structure of the MEMS devices.