Holding device for substrates as well as methods for coating a substrate

2010 
The present invention relates to a holder for substrates to be coated, comprising a support surface for the substrate to be coated. The holding device is designed for example as a plate, on which rests the substrate, thereby comprising one or more apertures, z. B. perforations, grooves etc., through which a pressure gradient between the substrate side and which can be set opposite side of the holding device. This temporary fixing of the substrate by suction on the holding device is possible. Also, the present invention relates to a method for coating a substrate, the use of the holding device according to the invention.
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