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Structure and properties of ion-implanted AlO
Structure and properties of ion-implanted AlO
1984
C.J. McHargue
G. C. Farlow
Carl W. White
B. R. Appleton
Peter Angelini
H. Naramoto
Keywords:
Ion implantation
Atomic physics
Elastic scattering
Ion
Ion channel
Charged particle
Chromium
Materials science
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