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A New High Density Plasma Etching System Using A Dipole-ring Magnet (DRM)
A New High Density Plasma Etching System Using A Dipole-ring Magnet (DRM)
1993
T. Ohiwa
Isahiro Hasegawa
M. Sekine
Keywords:
Magnetic flux leakage
Dipole
Magnet
Engineering
Magnetic field
Magnetic semiconductor
Plasma etching
Nuclear magnetic resonance
Atomic physics
high density
Etching
Condensed matter physics
Electronic engineering
Correction
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