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Deposition and Analysis of SAW Propagation Properties of Ta 2 O 5 Piezoelectric Thin Film on Pt Crystal Film
Deposition and Analysis of SAW Propagation Properties of Ta 2 O 5 Piezoelectric Thin Film on Pt Crystal Film
2021
Keisuke Matsuura
Masashi Suzuki
Shoji Kakio
Masanori Kodera
Hiroshi Funakubo
Keywords:
saw propagation
Optoelectronics
Deposition (chemistry)
piezoelectric thin films
Epitaxy
Crystal
Materials science
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