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Growth of SiC on Si(100) by Low-Pressure MOVPE
Growth of SiC on Si(100) by Low-Pressure MOVPE
2001
A. Bakin
A.A. Ivanov
Kensaku Hisada
Thomas Riedl
F. Hitzel
H.-H. Wehmann
A. Schlachetzki
Keywords:
Metalorganic vapour phase epitaxy
Metallurgy
Composite material
Materials science
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