A thermal driven microactuator for hard disk drive

This paper presents an electro-thermal microactuator for a dual stage actuation scheme. The size of the microactuator is 1.5×1.3×0.3 mm 3 . Power consumption was 5.8mW when the applied voltage was 3.5+/-3.5V from DC to 100 kHz. The resonant frequency was designed to be 36 kHz, and the achieve value was 33 kHz. We also developed a frequency response model of this microactuator and found that our model coincided well with experimental results.