Vacuum deposition apparatus and maintenance method

A complication of the apparatus structure, while suppressing an increase in size, the evaporation source to provide a vacuum vapor deposition apparatus can be separated from the atmosphere. A vacuum vapor deposition apparatus according to an embodiment of the present invention includes a vacuum evacuable deposition chamber 13 comprises a vaporization source unit 50. Evaporation source unit 50, and the evaporation source 51, a container 52 includes sealing mechanism 53a, and 53b, are arranged in the deposition chamber 13. Evaporation source 51 to generate steam of the evaporation material 100. Container 52 forms a housing chamber 521 for accommodating the evaporation source 51, the opening 522a for supplying the vapor of the vaporization material 100 to the deposition chamber 13 from the storage chamber 521, having a 522b. Sealing mechanism 53a, 53b is installed in the container 52, the opening 522a, and is configured to be able to close hermetically the 522b. .FIELD 4