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Acemap > Paper > Electrical Properties of RF-Sputtered FeSix Films and Their Relationship to Phase Transition from ε-FeSi to β-FeSi2 during Post-Annealing

Electrical Properties of RF-Sputtered FeSix Films and Their Relationship to Phase Transition from ε-FeSi to β-FeSi2 during Post-Annealing

2012 
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