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Cleaning of Carbon Contamination on Si Wafer with Activated Oxygen by Synchrotron Radiation
Cleaning of Carbon Contamination on Si Wafer with Activated Oxygen by Synchrotron Radiation
2010
周洪军 Zhou Hongjun
钟鹏飞 Zhong Pengfei
霍同林 Huo Tong-lin
蒋新亭 Jiang Xinting
郑津津 Zheng Jinjin
Keywords:
Synchrotron radiation
Optics
Oxygen
Radiochemistry
Physics
Contamination
Carbon
Wafer
activated oxygen
carbon contamination
Correction
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