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Geneating Solid Models for VLSI Process and Device Simulation
Geneating Solid Models for VLSI Process and Device Simulation
1992
P. Lamb
C. Hegarty
N. Hitschfeld
Wolfgang Fichtner
Keywords:
Visualization
Mesh generation
Very-large-scale integration
Process simulation
Electronic engineering
Materials science
Capacitance
Solid modeling
Control engineering
Information geometry
device simulation
Correction
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