GOALSERVER: A multiobjective design optimization tool for IC fabrication process

This paper presents an IC process design optiiiiizatioii tool, GOALSERVER, wliicli conihines a new iiiultiobjective optiniization algoritliiii and tlie unified IC process ad device simulation teclinique so that the fabricatioii process paraiiietmers caii be selected autoiiiatically t80 liavc the device parameters optiiiiized simultaneously. A siiiiple process clesigii optiiiiization descriptioii higriage is devised to allow easy user interaction. Arbit,rary initial giiessrs for the optiiiiizatioii probleiii can be clioseii t,o olhiii satisfactory Paretro-optiiiial solutioiis. All IC process design exaiiiple is giveii to illustrate tlie cllicielicy of this systeni.