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Electron Holography of CMOS Devices with Epitaxial Layers
Electron Holography of CMOS Devices with Epitaxial Layers
2014
M. Gribelyuk
V. Ontalus
Tn Adam
F.H. Baumann
P. R. Ronsheim
Keywords:
CMOS
Analytical chemistry
Epitaxy
Electron holography
Materials science
Metallurgy
Optoelectronics
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