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Theoretical study for wet oxidation reaction mechanisms at 4H-SiC/SiO 2 interfaces
Theoretical study for wet oxidation reaction mechanisms at 4H-SiC/SiO 2 interfaces
2017
Shinsuke Hori
Toru Akiyama
Kohji Nakamura
Tomonori Ito
Hiroyuki Kageshima
Masashi Uematsu
Kenji Shiraishi
Keywords:
Wet oxidation
Materials science
Reaction mechanism
Inorganic chemistry
Chemical engineering
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