Automatic and scalable parametric modeling for 1–100GHz transmission line

In this paper, an automatic parameter extraction and scalable modeling method for 1∼100GHz transmission line based on the equivalent-circuit model proposed in [1] is established. The parameters are extracted from electromagnetic simulations which are validated by the measurement date of the devices fabricated on HLMC 40nm RF CMOS process. This method is validated by application to scalable modeling of the coplanar waveguide (CPW) with satisfactory fitting accuracy.