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Acemap > Paper > I. Physikalisches Institut der Justus-Liebig-Universität, Gießen Hydrogénation of Reactively Sputtered AlNxOy Films

I. Physikalisches Institut der Justus-Liebig-Universität, Gießen Hydrogénation of Reactively Sputtered AlNxOy Films

1990 
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