Simulation and Analysis of Mechanical Behavior of Groove-Shaped Over-Squeezing During Mechanical Ruling

The single crystal diamond chisel-edge tool is used to machine the 79 g/mm echelle diffraction grating, which is used as the research background. DEFORM-3D finite element software is used to simulate the mechanical ruling grating processing, and the influence of the parameters of the ruling tool on the squeezing force of aluminum film material is obtained. By analyzing the flow law of several sampling points in the groove-shaped over-squeezing region, the slip deformation characteristics of the aluminum film during the groove-shaped over-squeezing are clarified. Moreover, the velocity and stress field of aluminum film are analyzed under groove over-squeezing phenomenon. Therefore, it provides a basis for predicting the phenomenon of groove-shaped over-squeezing in the mechanical ruling grating processing.