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Characterization of Planarized Low-k Dielectrics by Atomic Force Microscopy
Characterization of Planarized Low-k Dielectrics by Atomic Force Microscopy
2003
Elizabeth Covington
Eric Botello
Wayne Stalsworth
J. Andrew McDonald
Daniel M White
Christine Williams
Michael B. Arthur
Deborah C. Koeck
David Donnelly
Heather Claire Galloway
Keywords:
Dielectric
Corrosion inhibitor
Conductive atomic force microscopy
Atomic force microscopy
Chemical-mechanical planarization
Analytical chemistry
Integrated circuit
Kelvin probe force microscope
Materials science
Fourier transform infrared spectroscopy
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