Design, analysis and control of a 2D vibration device for vibration assisted micro milling

In this article, a new two-dimensional piezoelectric actuator driven vibration stage is proposed and prototyped. A double parallel four-bar linkage structure with double-layer flexible hinges is designed to guide the motion and reduce the displacement coupling effect between the two directions. The compliance modeling and dynamic analysis are carried out based on the matrix method and Lagrangian principle, and the results are verified by the finite-element analysis. A closed-loop control system is developed and proposed based on the LabVIEW program consisting of a data acquisition device and capacitive sensors. Machining experiments have been carried out to evaluate the performance of the vibration stage and the results show good agreement with the tooltip trajectory simulation results, which demonstrates the feasibility and effectiveness of the vibration stage for vibration-assisted micromilling.