Preparation and investigation of laser ablated PZT, PLZT and PbMg1/3Nb2/3O3 (PMN) ferroelectric films

1994 
Abstract Epitaxial thin films of Pb(ZrxTi1-x)O3, Pb1-xLax(ZryTiz)1–(x/4)O3, and PbMg1/3Nb2/3O3 were created by pulsed laser deposition on YBa2Cu3O7-x coated (100)SrTiO3 and (110)SrTiO3 substrates. Film properties were characterized by XRD, RBS and SEM. The remanent polarization and coercive field of the PZT(0.52, 0.48) film were 42 μCcm−2 and 55 kVcm−1. The change of film properties with deposition temperature were studied.
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