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Laser induced damage characteristics of optical thin film with ion assisted planarization and annealing
Laser induced damage characteristics of optical thin film with ion assisted planarization and annealing
2017
Hanchen Wang
Travis Day
Elizbieta Jankowska
Breandan Reagan
J. J. Rocca
Christopher J. Stolz
Paul B. Mirkarimi
James A. Folta
John Roehling
Carmen S. Menoni
Keywords:
Thin film
Laser
Annealing (metallurgy)
Ion
Chemical-mechanical planarization
Analytical chemistry
Materials science
optical thin film
Optoelectronics
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