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Identification of Extension Implant Defect in Sub-Micron CMOS ICs – Analysis Technique, Model, and Solution
Identification of Extension Implant Defect in Sub-Micron CMOS ICs – Analysis Technique, Model, and Solution
2011
Yuk Tsang
Giri Nallapati
Ron Skarupa
Brian G. Anthony
Keywords:
CMOS
Optoelectronics
Micrometre
Materials science
Implant
Correction
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