Characterization of a neutral atomic hydrogen source developed in the perspective of carbon materials etching study

Abstract This paper deals with the characterization of an atomic hydrogen source created in a radio-frequency reactor with a helicon configuration. To achieve this purpose, optical (laser induced fluorescence) and electrical (Langmuir probe) diagnostics are used to monitor the behavior of the species composing the plasma. The influence of pressure, gas composition, and impact of the magnetic fields (in the source and diffusion chambers) are investigated.