Selective deposition of polystyrene nanoparticles in a nanoetchpit array on a silicon substrate

Manabu Tanaka,Takumi Hosaka,Takashi Tanii,Iwao Ohdomari,Hiroyuki Nishide

Selective deposition of polystyrene nanoparticles in a nanoetchpit array on a silicon substrate

2004

Manabu Tanaka
Takumi Hosaka
Takashi Tanii
Iwao Ohdomari
Hiroyuki Nishide

Nanometer-sized polystyrene particles were selectively deposited by interfacial tension in nanometer-sized etchpit arrays made on a silicon substrate.

Keywords:

Organic chemistry
Nanoparticle
Polystyrene
Inorganic chemistry
Surface tension
Substrate (chemistry)
Chemistry
Silicon
selective deposition
Chemical engineering
Mineralogy
polystyrene nanoparticles

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